Mask Aligner
Laser Writer
Plasma Etcher
Metal Evaporator （E-beam + Thermal heating）
TESCAN SEM-EBL
Optical Microscopy
Glove box
Gulou Campus：22 Hankou Road,
Gulou District, Nanjing, Jiangsu
Province, 210093
Xianlin Campus：163 Xianlin Road,
Qixia District, Nanjing, Jiangsu
Province, 210023