Mask Aligner
Laser Writer
Plasma Etcher
Metal Evaporator (E-beam + Thermal heating)
TESCAN SEM-EBL
Optical Microscopy
Glove box
Gulou Campus:22 Hankou Road,
Gulou District, Nanjing, Jiangsu
Province, 210093
Xianlin Campus:163 Xianlin Road,
Qixia District, Nanjing, Jiangsu
Province, 210023